TY  - CONF
AU  - Sebastien Bergna
AU  - Jason Gorman
AU  - Nicholas Dagalakis
C2  - Proceedings of ASME International Mechanical Engineering Congress and Exposition, Orlando, FL
DA  - 2005-11-11
LA  - en
M1  - IMECE2005-82158
PB  - Proceedings of ASME International Mechanical Engineering Congress and Exposition, Orlando, FL
PY  - 2005
TI  - Design and Modeling of Thermally Actuated MEMS Nanopositioners
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822370
ER  -