TY - CONF AU - Shaw Feng AU - Che Joung AU - Theodore Vorburger C2 - Scanning 2008, Gaithersburg, MD DA - 2008-03-17 LA - en PB - Scanning 2008, Gaithersburg, MD PY - 2008 TI - A Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824625 ER -