TY  - GEN
AU  - Bom, Sthitie
AU  - Davis, Jim
AU  - Kramer, Bruce
AU  - Vogl, Gregory
AU  - Jahanmir, Said
AU  - Ufford, Don
C2  - Advanced Manufacturing Series (NIST AMS), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2025-11-18 05:11:00
DO  - https://doi.org/10.6028/NIST.AMS.100-72
LA  - en
PB  - Advanced Manufacturing Series (NIST AMS), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2025
TI  - Artificial Intelligence with Open and Scaled Data Sharing in Semiconductor Manufacturing – Workshop Report
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960553
ER  -