TY  - JOUR
AU  - Maslar, James
AU  - Kimes, William A.
AU  - Sperling, Brent
AU  - Kanjolia, Ravindra
C2  - Journal of Vacuum Science & Technology A
DA  - 2020-12-10 05:12:00
DO  - https://doi.org/10.1116/6.0000676
LA  - en
M1  - 39
PB  - Journal of Vacuum Science & Technology A
PY  - 2020
TI  - Characterization of vapor draw vessel performance for low-volatility solid precursor delivery
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930820
ER  -