TY  - JOUR
AU  - Simons, David S.
AU  - KIM, Kyung Joong
AU  - Jang, Jong
AU  - Bennett, Joe
AU  - Barozzi, Mario
AU  - Takano, Akio
AU  - Li, Zhanping
AU  - Magee, C.
C2  - Surface and Interface Analysis
DA  - 2017-07-04 04:07:00
LA  - en
PB  - Surface and Interface Analysis
PY  - 2017
TI  - Round-Robin Test for the Measurement of Layer Thickness of Multilayer Films by Secondary Ion Mass Spectrometry Depth Profiling
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922276
ER  -