TY  - JOUR
AU  - Griesmann, Ulf
AU  - Garcia, Sofia Corzo
C2  - Optical Engineering
DA  - 2023-01-02 05:01:00
LA  - en
PB  - Optical Engineering
PY  - 2023
TI  - Fabrication Error Detection in Diffraction Gratings with High-Dynamic-Range Fourier Plane Imaging and Spatial Filtering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934926
ER  -