TY  - CONF
AU  - Griesmann, Ulf
AU  - Munechika, Keiko
AU  - Renegar, Thomas
AU  - Zheng, Xiaoyu
AU  - Soons, Johannes
AU  - Chao, Weilun
AU  - Lacey, Ian
AU  - Pina-Hernandez, Carlos
AU  - Takacs, Peter
AU  - Yashchuk, Valeriy
AU  - Germer, Thomas
C2  - Proceedings of SPIE 12223, San Diego, CA, US
DA  - 2022-10-03 04:10:00
LA  - en
PB  - Proceedings of SPIE 12223, San Diego, CA, US
PY  - 2022
TI  - Characterization of Surface Texture-Measuring Optical Microscopes using a Binary Pseudo-Random Array Standard
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935281
ER  -