TY  - CONF
AU  - Chew, Aaron
AU  - Barnes, Bryan
AU  - Shirley, Eric
AU  - Germer, Thomas
C2  - Metrology, Inspection, Process Control, xxxix, San Jose, CA, US
DA  - 2025-04-24 04:04:00
DO  - https://doi.org/10.1117/12.3053165
LA  - en
M1  - 13426
PB  - Metrology, Inspection, Process Control, xxxix, San Jose, CA, US
PY  - 2025
TI  - Ellipsometry in the EUV Regime
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959589
ER  -