TY  - JOUR
AU  - Simmonds, Raymond
AU  - Sahu, Sudhir
AU  - Larson, Trevyn
AU  - Lecocq, Florent
AU  - Zhao, Tongyu
AU  - McFadden, Anthony
C2  - npj Quantum Information
DA  - 2025-01-22 05:01:00
LA  - en
PB  - npj Quantum Information
PY  - 2025
TI  - Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958235
ER  -