TY  - JOUR
AU  - Lahr, David
AU  - Hertz, Joshua
AU  - Semancik, Stephen
C2  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
DA  - 2010-02-17 05:02:00
DO  - https://doi.org/10.1109/JMEMS.2010.2040242
LA  - en
PB  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
PY  - 2010
TI  - A Combinatorial Study of Thin Film Process Variables Using Microhotplates
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901990
ER  -