TY  - JOUR
AU  - Han, Xu
AU  - Miller, Marcella
AU  - Moyne, James
AU  - Vogl, Gregory
AU  - Penkova, Anita
AU  - Jia, Xiaodong
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2025-01-20 05:01:00
DO  - https://doi.org/10.1109/TSM.2025.3531920
LA  - en
M1  - 38
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2025
TI  - A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958452
ER  -