TY  - CONF
AU  - Yamane, Wataru
AU  - Westly, Daron
AU  - Holland, Glenn
AU  - Yamazawa, Yu
AU  - Ito, Naoto
AU  - Vladar, Andras
AU  - Villarrubia, John
C2  - Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US
DA  - 2025-04-22 04:04:00
DO  - https://doi.org/10.1117/12.3046309
LA  - en
M1  - 13426
PB  - Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US
PY  - 2025
TI  - Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959651
ER  -