TY - CONF AU - Yamane, Wataru AU - Westly, Daron AU - Holland, Glenn AU - Yamazawa, Yu AU - Ito, Naoto AU - Vladar, Andras AU - Villarrubia, John C2 - Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US DA - 2025-04-22 04:04:00 DO - https://doi.org/10.1117/12.3046309 LA - en M1 - 13426 PB - Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US PY - 2025 TI - Multi-technique reference measurement of critical dimension and shape for model validation in scanning electron microscopy UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959651 ER -