TY  - JOUR
AU  - Duff, Shannon
AU  - Austermann, Jason
AU  - Beall, James
AU  - Daniel, David
AU  - Hubmayr, Johannes
AU  - Jaehnig, Gregory
AU  - Johnson, Bradley
AU  - Jones, Dante
AU  - Link, Michael J.
AU  - Lucas, Tammy
AU  - Sonka, Rita
AU  - Staggs, Suzanne
AU  - Ullom, Joel
AU  - Wang, Yuhan
C2  - Journal of Low Temperature Physics
DA  - 2024-05-04 04:05:00
DO  - https://doi.org/10.1007/s10909-024-03117-x
LA  - en
M1  - 216
PB  - Journal of Low Temperature Physics
PY  - 2024
TI  - The Simons Observatory: Production-Level Fabrication of the Mid- and Ultra-High-Frequency Wafers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956921
ER  -