TY  - CONF
AU  - Dai, Gaoliang
AU  - Fluegge, Jens
AU  - Bosse, Harald
AU  - Dixson, Ronald G.
C2  - Euspen - 17th International Conference and Exhibition, Hannover, DE
DA  - 2017-05-29 04:05:00
LA  - en
PB  - Euspen - 17th International Conference and Exhibition, Hannover, DE
PY  - 2017
TI  - A bottom-up approach for traceable nano dimensional metrology
ER  -