TY - JOUR AU - Jones, Robert AU - Cheron, Jerome AU - Jamroz, Benjamin AU - Williams, Dylan AU - Feldman, Ari AU - Aaen, Peter AU - Long, Christian AU - Orloff, Nathan C2 - IEEE Transactions on Terahertz Science and Technology DA - 2024-07-19 04:07:00 DO - https://doi.org/10.1109/TTHZ.2024.3431190 LA - en M1 - 14 PB - IEEE Transactions on Terahertz Science and Technology PY - 2024 TI - On-Wafer Capacitor Characterization Including Uncertainty Estimates Up to 1.0 THz UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957140 ER -