TY  - CONF
AU  - Thomas Germer
C2  - Surface Scattering and Diffraction for Advanced Metrology II , Seattle, WA
DA  - 2002-01-01
LA  - en
PB  - Surface Scattering and Diffraction for Advanced Metrology II , Seattle, WA
PY  - 2002
TI  - Measurement of Lithographic Overlay by Light Scattering Ellipsometry, ed. by Z.H. Gu and A.A. Maradudin
ER  -