TY  - JOUR
AU  - Thomas Germer
AU  - B Scheer
C2  - Scattering and Surface Roughness II SPIE
DA  - 1998-01-01
LA  - en
M1  - 3426
PB  - Scattering and Surface Roughness II SPIE
PY  - 1998
TI  - Polarization of out-of-plane optical scatter from SiO<sub>2</sub> films grown on photolithographically-generated microrough silicon, ed. by Z.H. Gu and A.A. Maradudin
ER  -