TY - CONF AU - Lori Goldner C2 - 17TH International Conference on the Application of Accelerators in Research and Industry, Denton, TX DA - 2003-01-01 LA - en PB - 17TH International Conference on the Application of Accelerators in Research and Industry, Denton, TX PY - 2003 TI - Highly Charged Ion Bombardment of Silicon Surfaces Applications of Accelerators in Research and Industry, ed. by J.L. Duggan ER -