TY  - CONF
AU  - Marla L. Dowell
AU  - Hannah Brown
AU  - Gretchen Greene
AU  - Paul D. Hale
AU  - Brian Hoskins
AU  - Sarah Hughes
AU  - Bob R. Keller
AU  - R Joseph Kline
AU  - June W. Lau
AU  - Jeff Shainline
C2  - E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US
DA  - 2024-02-13 14:02:18
LA  - en
PB  - E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US
PY  - 2024
TI  - Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program
ER  -