TY - GEN AU - Jason Kahn AU - Chris Greer C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2023-12-05 05:12:00 DO - https://doi.org/10.6028/NIST.IR.8501 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2023 TI - Semiconductors and Microelectronics Standards, Report of the Semiconductors and Microelectronics Working Group UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956962 ER -