TY  - JOUR
AU  - Robert Berg
C2  - Journal of Vacuum Science and Technology A
DA  - 2008-08-06
DO  - https://doi.org/10.1116/1.2953715
LA  - en
M1  - 26
PB  - Journal of Vacuum Science and Technology A
PY  - 2008
TI  - Capillary flow meter for calibrating spinning rotor gauges
ER  -