TY  - CONF
AU  - Charles Tarrio
AU  - Steven Grantham
AU  - Marc Cangemi
AU  - Robert Vest
AU  - Thomas Lucatorto
AU  - Noreen Harned
C2  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
DA  - 2009-03-13
LA  - en
PB  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
PY  - 2009
TI  - EUVL dosimetry at NIST
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901663
ER  -