TY - GEN AU - David Casasent AU - C L Wilson C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1997-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6060 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1997 TI - Optical metrology for industrialization of optical information processing: ER -