TY - GEN AU - Joaquin V Martinez de Pinillos AU - Stephen Knight AU - Alice Settle-Raskin C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6522 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments ER -