TY  - GEN
AU  - Vorburger, T V
AU  - Raja, J
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1990-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.89-4088
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1990
TI  - Surface finish metrology tutorial:
ER  -