TY - GEN AU - Rennex, Brian G C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1994-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.SP.260-121 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1994 TI - Standard Reference Materials ::Certification of a standard reference material for the determination of interstitial oxygen concentration in semiconductor silicon by infrared spectrophotometry/ ER -