TY  - GEN
AU  - Warren K Gladden
AU  - Stephen R Slaughter
AU  - Walter M Duncan
AU  - Aslan Baghdadi
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1988-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.SP.400-81
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1988
TI  - Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides:
ER  -