TY - GEN AU - Marshall, J C AU - Mattis, R L C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1992-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.SP.400-90 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1992 TI - Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2: ER -