TY  - GEN
AU  - N J Tighe
AU  - S M Wiederhorn
AU  - L R Russell
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1977-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.77-1202
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1977
TI  - Application of proof tests to silicon nitride:
ER  -