TY  - GEN
AU  - Santos Mayo
AU  - William H Evans
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1979-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.78-1558
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1979
TI  - Development of hydrogen and hydroxyl contamination in thin silicon dioxide thermal films:
ER  -