TY - GEN AU - Loren W Linholm C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1979-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.IR.79-1595 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1979 TI - CMOSSOS test patterns for process evaluation and control ::annual report, March 1 to November 1, 1978 ER -