TY - GEN AU - G P Carver AU - R L Mattis AU - M G Buehler C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1981-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.IR.81-2234 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1981 TI - Microelectronic test patterns NBS-12 and NBS-24: ER -