TY - GEN AU - Mattis, Richard L AU - Buehler, Martin G C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1975-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-11 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1975 TI - A BASIC program for calculating dopant density profiles from capaciyance-voltage: ER -