TY - GEN AU - David E Sawyer AU - David W Berning C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1977-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-24 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1977 TI - A laser scanner for semiconductor devices: ER -