TY - GEN AU - Sawyer, David E AU - Berning, David W C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1976-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-27 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1976 TI - Laser scanning of active semiconductor devices-videotape script: ER -