TY  - GEN
AU  - Werner Kern
AU  - Robert B Comizzoli
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1977-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-31
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1977
TI  - Techniques for measuring the integrity of passivation overcoats on integrated circuits:
ER  -