TY  - GEN
AU  - Bullis, W Murray
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1979-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-38
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1979
TI  - Semiconductor measurement technology:
ER  -