TY - GEN AU - Martin G Buehler C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1974-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-6 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1974 TI - Microelectronic test patterns: ER -