TY - GEN AU - Carver, G P AU - Cullins, W A C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1981-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-68 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1981 TI - A manual wafer probe station for an integrated circuit test system: ER -