TY - GEN AU - Cohen, Elaine C AU - Ruthberg, Stanley C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1982-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-72 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1982 TI - NBSRADC workshop moisture measurement technology for hermetic semiconductor devices II: ER -