TY - GEN AU - A Baghdadi AU - E J Walters C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1987-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-80 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1987 TI - Silicon-on-insulator: ER -