TY - GEN AU - Heinrich, Kurt F J AU - Newbury, Dale E AU - Yakowitz, Harvey C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1976-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.460 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1976 TI - Use of Monte Carlo calculations in electron probe microanalysis and scanning electron microscopy: ER -