TY - JOUR AU - Laracuente, A AU - Bronikowski, M AU - Gallagher, A C2 - Proceedings of Atomically Controlled Surfaces and Interfaces Conference Appl Surf Sci DA - 1996-01-01 LA - en M1 - 107 PB - Proceedings of Atomically Controlled Surfaces and Interfaces Conference Appl Surf Sci PY - 1996 TI - Chemical vapor deposition of nanometer size aluminum features on silicon surfaces using an STM tip ER -