TY  - JOUR
AU  - S Leone
C2  - Jpn J Appl Phys Part 1
DA  - 1995-01-01
LA  - en
M1  - 34
PB  - Jpn J Appl Phys Part 1
PY  - 1995
TI  - Kinetic-energy-enhanced neutral etching
ER  -