TY - GEN AU - W Murray Bullis C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1969-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.TN.488 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1969 TI - Methods of measurement for semiconductor materials, process control, and devices, quarterly report, January 1 to March 31, 1969.: ER -