TY - GEN AU - George G Harman C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1971-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.TN.573 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1971 TI - Application of capacitor microphones and magnetic pickups to the tuning and trouble shooting of microelectronic ultrasonic bonding equipment: ER -