TY - GEN AU - W Murray Bullis C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1972-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.TN.727 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1972 TI - Methods of measurement for semiconductor materials, process control, and devices quarterly report ::October 1 to December 30, 1971 ER -