TY  - JOUR
AU  - Ronald Dixson
AU  - Boon
AU  - Ndubuisi Orji
C2  - Measurement Science and Technology
DA  - 2014-08-12
LA  - en
M1  - 25
PB  - Measurement Science and Technology
PY  - 2014
TI  - Effects of Lateral Tip Control in CD-AFM Width Metrology
ER  -