TY  - JOUR
AU  - Jabez McClelland
AU  - Robert Celotta
C2  - Thin Solid Films
DA  - 2000-05-15
LA  - en
M1  - 367
PB  - Thin Solid Films
PY  - 2000
TI  - Laser-Focused Atomic Deposition - Nanofabrication via Atom Optics
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620525
ER  -