TY  - JOUR
AU  - Jabez McClelland
AU  - R Gupta
AU  - Robert Celotta
AU  - G Porkolab
C2  - Applied Physics B-Lasers and Optics
DA  - 1998-01-01
LA  - en
M1  - 66
PB  - Applied Physics B-Lasers and Optics
PY  - 1998
TI  - Nanostructure Fabrication by Reactive-ion Etching of Laser-Focused Chromium on Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620488
ER  -